Microfabrication technologies for high aspect ratio processes.

Manufacturing costs for microsystems/MEMS using high aspect ratio microfabrication techniques

The emphasis on high aspect ratio micromachining techniques for microsystems/MEMS has been mainly to achieve novel devices with, for example, high sensing or actuation performance. Often these utilize deep structures (100–1,000 lm) with vertical wall layers but with relatively modest spatial resolution (1–10 lm). As these techniques move from research to industrial manufacture, the capital cost...

Microfabrication of Aircore Toroidal Inductorwith Very High Aspect Ratio Metalencapsulated Polymer Vias

Aspect-Ratio-Dependent Copper Electrodeposition Technique for Very High Aspect-Ratio Through-Hole Plating

Copper electrodeposition in high-aspect-ratio through-holes micromachined by deep reactive ion etching is one of the most essential processes for fabricating through-wafer interconnects, which will be used in developing future generation high-speed, compact 3D microelectronic devices. Although copper electrodeposition is a well-established process, completely void-free electroplating in very de...

The Application of Surface Mount Processes for the Economical Production of High-aspect-ratio Microchannel Arrays

This paper reports on the feasibility of using surface mount technology (SMT) assembly processes and materials to produce highly parallel, high-aspect ratio microchannel arrays. Experimental results show that the fabrication of high-aspect-ratio (> 40:1) microchannel arrays is possible using solder paste, screen printing, and reflow bonding. A simple model and empirical examination verifies tha...

Microfabrication technologies for integrated nucleic acid analysis.

X Chromosome Map at 75-kb STS Resolution, Revealing Extremes of Recombination and GC Content Ramaiah Nagaraja, Sandra MacMillan, Juha Kere, Carmela Jones, Stephanie Griffin, Matthew Schmatz, Jennifer Terrell, Michael Shomaker, Christopher Jermak, Christian Hott, Mochubeloa Masisi, Steven Mumm, Anand Srivastava, Giuseppe Pilia, Terence Featherstone, Richard Mazzarella, Sheila Kesterson, Brigid M...